发明名称 Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus
摘要 The invention provides a method for determining vibration-related information by projecting an aerial image at an image position in a projection plane, mapping an intensity of the aerial image into an image map, the image map arranged for comprising values of coordinates of sampling locations and of the intensity sampled at each sampling location, and measuring intensity of the aerial image received through a slot pattern. The method further includes determining from the image map a detection position of a slope portion of the image map, at the detection position of the slope portion, measuring of a temporal intensity of the aerial image and measuring of relative positions of the slot pattern and the image position, the relative positions of the slot being measured as position-related data of the slot pattern and determining from the temporal intensity of the aerial image vibration-related information for said aerial image.
申请公布号 US7773235(B2) 申请公布日期 2010.08.10
申请号 US20080216514 申请日期 2008.07.07
申请人 ASML NETHERLANDS B.V. 发明人 KOK HAICO VICTOR;KIVITS KOEN;VAN DE LAAK RON;KUIPER JOHANNES MARIA;VAN DER ZOUW GERBRAND;TOLSMA HOITE P THEODOOR
分类号 G01B11/14 主分类号 G01B11/14
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