BATCH TYPE HEAT TREATMENT APPARATUS

摘要

PURPOSE: A batch type heating treatment device is provided to uniformly execute a heat treatment for all substrate which are loaded inside a chamber by uniformly supplying required gas into the chamber. CONSTITUTION: A chamber(20) offers a heat treatment space concerning a plurality of substrates(10). A boat loads and supports a plurality of substrates. A plurality of heaters are arranged along the laminated direction of the substrate with a uniform interval. A gas pipe base is installed in one side of the chamber. A gas supply pipe and a gas vent pipe are connected to the gas pipe base.