SENSOR SYSTEM FOR SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PURPOSE: A sensor-system for a semiconductor manufacturing machine is provided to reduce electrical signal abnormalities including crowbar effect by matching the pull-up networks of a chamber controlling board and a central controlling unit. CONSTITUTION: A first rotating-substrate supporting unit is arranged in a first processing chamber(202). A second rotating-substrate supporting unit is arranged in a second processing chamber. A first sensor-line connects a first sensor with a first chamber board(208). A second sensor-line connects a second sensor with a second chamber board. A central controlling unit(210) determines the rotary speed for the first and the second rotating-substrate supporting units. A remote controlling system transmits controlling parameters to the central controlling unit.