| 摘要 |
PROBLEM TO BE SOLVED: To simply measure the refractive index distribution of a transparent matter such as glass or plastics in a non-destructive manner. SOLUTION: Two probe optical systems are arranged so as to hold an inspection target to be used in measurement to thereby calculate the light path length of the locally specified light penetrating through the inspection target by utilizing the interference signals of the probe optical systems, the geometric thickness of the same part is calculated by measuring the positions of the probe optical systems to calculate both calculated values, and the refractive index distribution of the inspection target is calculated on the basis of those calculated values and the calculated value in a reference article. COPYRIGHT: (C)2010,JPO&INPIT
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