| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a solid-state imaging apparatus that improves transfer efficiency without impairing transfer capacity at a branched HCCD, and can be stably manufactured. <P>SOLUTION: An image sensor includes an HCCD 14 which transfers signal charge in a horizontal direction. The HCCD 14 includes a serial HCCD 16, a branch unit 17, and parallel HCCDs 18a and 18b. The serial HCCD 16 is connected to a plurality of arrays of VCCDs, and transfers signal charge accumulated in each pixel 12 in the horizontal direction. The branch unit 17 is provided while being connected to the terminal of the serial HCCD 16, and branches and transfers signal charge in two directions. The parallel HCCDs 18a and 18b are provided while being connected with the branch unit 17, and have a plurality of charge holding regions where signal charges are transferred in order in a certain direction across a potential barrier, and potential distribution in a charge holding region at a starting end adjacent to the branch unit 17 among the charge holding regions, decreases along the transfer direction of the signal charge. <P>COPYRIGHT: (C)2010,JPO&INPIT |
