| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of tuning fork vibrators for angular velocity sensors, which inhibit unwanted signal generation towards Z-axis direction during tuning fork vibration towards X-axis direction to collectively be formed in silicon wafer, and the angular velocity sensor using the above thinned tuning fork vibrators for angular velocity sensors. <P>SOLUTION: In this manufacturing method, additional masses 7a and 7b are given to end sides on each main faces 1c, 1d on arms 1a, 1b of the tuning fork vibrator 3, and also to the outside and the inside of each of them, respectively. Grooves 8a and 8b are formed on end sides of each main faces 1c, 1d on arms 1a, 1b, and also on the outside and the inside of each of them, respectively. <P>COPYRIGHT: (C)2010,JPO&INPIT |
