发明名称 SENSOR WITH MOVING AMOUNT MEASURING FUNCTION, AND MEASURING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To solve the problems, wherein when measuring a film thickness distribution of a film sheet, or the like, though a measuring position is input by fixing a prove and moving the film sheet, or by fixing the film sheet and moving the prove by a hand, measurement is complicated, because in the former case, a device for moving the film sheet becomes large, and in the latter case, position input is required at each measurement. Ž<P>SOLUTION: A sensor and a moving amount measuring part for detecting a moving amount are fixed on a fixing stand, and an operation for moving the fixing stand to set the sensor on a measuring position, and performing measurement is repeated. A mouse is used as the moving amount measuring part. Since there is no requirement for a measuring object, such as the film sheet to be moved, the device is significantly simplified. Furthermore, since the measuring position can be calculated from the moving amount, the labor of inputting the measuring position can be omitted. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010169605(A) 申请公布日期 2010.08.05
申请号 JP20090013807 申请日期 2009.01.26
申请人 YOKOGAWA ELECTRIC CORP 发明人 NISHIDA KAZUFUMI;TSUJII ATSUSHI;OHIGATA YOSHIHIKO
分类号 G01B11/00;G01B11/06 主分类号 G01B11/00
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