| 摘要 |
A positioning apparatus of the present invention performs a positioning of an object with a predetermined number of degrees of freedom. The positioning apparatus comprises a plurality of drivers whose number is more than that of the degrees of freedom, which are configured to drive the object, a calculator configured to calculate target positions of the plurality of drivers from a target position of the object using a measurement result of a shape of the object previously measured, and a controller configured to control the plurality of drivers so as to come close to the target positions of the plurality of drivers.
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