摘要 |
PROBLEM TO BE SOLVED: To provide a detergent composition for an HD (hard disk) substrate which exhibits excellent detergency and anti-foaming property with less COD, and to provide a method of manufacturing the HD substrate using the detergent composition. SOLUTION: The detergent composition for the HD substrate including an Ni-P content layer includes: polyacrylic acid alkali metal salt whose weight average molecular weight is 1,000-10,000 (component (a)); p-toluenesulfonic acid alkali metal salt (component (b)); water-soluble amine compound (component (c)); chelating agent (component (d)); and water (component (e)), and does not substantially includes nonionic surfactant. Within the total amount of the components (a), (b), (c) and (d), the detergent composition includes; 5-35 wt.% of the component (a); 15-50 wt.% of the component (b); 15-50 wt.% of the component (c); and 5-25 wt.% of the component (d), and a weight ratio of the component (c) and component (d) äcomponent (c)/component (d)} is 0.8-5. COPYRIGHT: (C)2010,JPO&INPIT
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