| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor inspection method for quickly and accurately counting semiconductor cells. SOLUTION: In the SEM, an optical system axis and a stage rotation axis are shifted if an observation environment and an adjusting environment are different because adjustment is carried out under specific conditions. The shift is reduced by easily adjusting the axis shift for each observation environment. After drawing a line which seems to be perpendicular or horizontal by a mouse and carrying out raster rotation matching with a closest axis, a stage is moved horizontally to adjust an angle by carrying out pattern matching with an image which is placed at an original position where it should be. The number of cells is displayed with a value 302 by linearly moving a stage moving method to a target place by moving in XY-axis equivalent or the like to synchronize smooth stage movement, and surrounding one cell 201 in one rectangular frame 205 by a rule 301. With this, accurate directionality and stable speed is obtained, and using the above, image corrections (501-504) are carried out while stage moving (403), counting of the cell 201 is carried out easily and accurately. COPYRIGHT: (C)2010,JPO&INPIT
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