| 摘要 |
PROBLEM TO BE SOLVED: To reduce reflectivity at an output end and to enable high-speed response. SOLUTION: The waveguide-type optical functional device includes a semiconductor substrate where a waveguide region 21 and a window region 26 are set; an optical waveguide 30 formed on the semiconductor substrate in the waveguide region as a bent waveguide; and a window structure formed on the semiconductor substrate in the window region. The optical waveguide is formed as a bent waveguide and further, the window structure is provided so as to reduce reflectivity and to constitute the optical waveguide as a reverse-mesa type ridge waveguide structure, for high-speed response. COPYRIGHT: (C)2010,JPO&INPIT |
