| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an imprinting method preventing separation of a resist film over a further long term, in an imprinting method of transferring and forming a minute pattern to/on a shape transferring object layer using a stamper having an irregular pattern. Ž<P>SOLUTION: The imprinting method includes: a pattern formation step of transferring and forming a minute pattern 31 to/on the shape transferring object layer 30 formed on a substrate with a stamper 10 having an uneven pattern 11; and a curing step of curing the layer 30' with the minute pattern 31 transferred and formed thereon. The stamper 10 is formed of a porous material. The imprinting method includes a parting agent attaching step of attaching a liquid-like parting agent 20 to the stamper 10 before the pattern formation process. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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