METHOD FOR PRODUCING A SOLAR CELL HAVING TWO-STAGE DOPING

摘要

A method for producing a solar cell having two-stage doping (20a, 20b; 34a, 34b; 44a, 44b), wherein a doping region (20; 28; 44) of a solar cell substrate (10; 11) is slightly doped (132) at least in some sections, a diffusion barrier (12; 16; 42) is configured (102; 122) in the doping region (20; 28; 44) on a surface of the solar cell substrate (10; 11), local openings (16; 30; 47) are introduced (104; 114; 134) into the diffusion barrier (12; 26; 42), and the solar cell substrate (10; 11) in regions of the local openings (16; 30; 47) is heavily doped (106; 136), wherein the diffusion barrier (12; 26; 42) is thermally grown or applied (102; 122) onto the surface of the solar cell substrate by means of chemical or physical deposition from a vapor phase.