| 摘要 |
PROBLEM TO BE SOLVED: To provide a lead inspection method for an IC lead frame and an apparatus of the same capable of easily inspecting the distance between adjacent lead frontend parts with accuracy. SOLUTION: On an image of an IC lead frame having an island and a plurality of leads, arranged radially around the island, and which is formed so that a shape along a frontend of the lead is polygonal, each side of the polygon along the frontend of the lead is calculated. A reference line obtained by moving each side from a position along the frontend of the lead to a predetermined position in parallel is calculated; a first cross point consisting of a cross point of a first corner which is one corner among the opposed corners of adjacent leads and the reference line is calculated; a detected line consisting of a plurality of lines passing the first cross point and a second corner which is the other corner among the opposed corners is calculated; and a straight-line distance between the first cross point and the second corner on the reference line and on the detected line is calculated. COPYRIGHT: (C)2010,JPO&INPIT |
