| 摘要 |
PROBLEM TO BE SOLVED: To recycle a used polishing slurry having cleaning water mixed therein and solve the problem of waste fluid disposal. SOLUTION: The method for regenerating the used slurry includes a step of selectively separating and removing a polishing slurry component consisting of abrasives, a solvent, and an additive from a foreign substance component such as a liquid, a polishing object, a pad, and a dresser, which are mixed by the polishing operation and not intrinsically contained in the polishing slurry. COPYRIGHT: (C)2010,JPO&INPIT |
