发明名称 METHOD OF MANUFACTURING ELECTRONIC/ELECTRIC CIRCUIT
摘要 <P>PROBLEM TO BE SOLVED: To provide a method of manufacturing electronic/electric circuit by which a large-sized electronic/electric circuit can be manufactured with good alignment precision using a simpler printing device. <P>SOLUTION: There is provided the method of manufacturing the electronic/electric circuit by which the electronic/electric circuit constituted of elements each formed of a plurality of constituents is manufactured using a printing method. On a reverse surface of a substrate 100 which transmits light or an electromagnetic wave of specified wavelength, alignment marks 11 to 19 (mark patterns) having low transmissivity to the light or electromagnetic wave are arranged and irradiated with the light or electromagnetic wave from the top surface of the substrate 100, and alignment is carried out by detecting positions of the alignment marks 11 to 19, thereby forming respective constituents of the each element by using the printing method. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010171160(A) 申请公布日期 2010.08.05
申请号 JP20090011625 申请日期 2009.01.22
申请人 NEC CORP 发明人 NUMATA HIDEAKI
分类号 H01L21/336;B82B3/00;G09F9/30;H01L21/027;H01L29/786;H05K3/00 主分类号 H01L21/336
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