| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To minimize occurrence of peeling of a film on the interface of the film, or leakage between adjacent interconnects in an interlayer insulating film having film quality regions different from each other. <P>SOLUTION: An interlayer insulating film of single layer structure, i.e. a third insulating film 107, has a plurality of pores 120. The pore occupancy per unit volume in the third insulating film 107 changes in the direction of film thickness. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
