| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of measuring lens aberrations, dispensing with inclination adjusting work to make an optical axis of an interferometer coincide with a lens optical axis, and shortening the total measurement time. Ž<P>SOLUTION: This method of measuring lens aberration using an interferometer includes a step (a3) for measuring (a2) the inclination of a lens, relative to the optical axis of the interferometer to calculate aberration Wt caused by the inclination; a step (a4) for measuring aberration Wp of the lens in an inclined state by using the interferometer;, and a step (a5) for calculating aberration Wo specific to the lens by removing the aberration Wt from the measured aberrations Wp. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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