摘要 |
PROBLEM TO BE SOLVED: To provide an elastic surface wave measuring device for measuring the variations in the state of a plurality of surrounding materials, with higher precision and accuracy than in conventional types. SOLUTION: In this elastic surface wave measuring device, elastic surface wave exciting/detecting means 14a, 14b and 14c excite and circulate elastic surface waves, based on a high frequency signal in annular continuous elastic surface wave circuits 12a, 12b and 12c on the surfaces of a plurality of substrates 12, detect the circulated elastic surface wave, and emit a received signal. A high-frequency signal inputting/received signal fetching means 56 simultaneously inputs high-frequency signals to a plurality of exciting/detecting means in phase, and fetches received signals from the elastic surface wave after the circulation of different times. A measuring means 46 measures predetermined characteristics of the surface waves corresponding to the plurality of received signals at different times. COPYRIGHT: (C)2010,JPO&INPIT
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