Vacuum chamber for the reception of a component, comprises a first gas tightly sealable reception area, a reception device for the component, and a second reception area arranged within the first reception area

摘要

The vacuum chamber comprises a first gas tightly sealable reception area (3), a reception device for the component, and a second reception area (5) arranged within the first reception area. In the second reception area, a component (19) is partially received. The second reception area has a first opening (6) by which the second reception area stands in connection with part (13) of the first reception area corresponding to the second reception area, and a sealing by which the second reception area is sealed against the first reception area in related to the first opening. The vacuum chamber comprises a first gas tightly sealable reception area (3), a reception device for a component (19), and a second reception area (5) arranged within the first reception area. In the second reception area, the component is partially received. The second reception area has a first opening (6) by which the second reception area stands in connection with part (13) of the first reception area corresponding to the second reception area, and a sealing by which the second reception area arranged together with the component in the reception device is sealed against the first reception area in related to the first opening. The second reception area is a part of the first reception area separated through an intermediate wall or is a multilateral capsule separated through a characteristic housing of the first reception area. The first and second reception areas have separate vacuum pump, and separate access openings in a vacuum chamber external wall or the first reception area has individual access openings. The second reception area is connected over a gas-tight connection line through the first reception area with the vacuum chamber external wall. The capsule is freely movable independent from the first reception area and has a torus-like or ring-like housing structure. The first opening has the form of a disc or cylinder. One, two or more ring-shaped sealings are arranged on the first opening. A second opening for pressure balance is arranged with a lockable cover or a valve is arranged between the first reception area and second reception area. The second opening is associated to a pressure container for pressure-dependent opening and/or closing the second opening. The first and second reception areas have vacuum pump or pumping stations and/or gas inlet. The reception device is formed so that a part of the component is freely accessible from the first reception area. An independent claim is included for a method for operating a vacuum chamber.