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发明名称
Verfahren zum Herstellen einer Halbleitervorrichtung
摘要
申请公布号
DE19655407(B4)
申请公布日期
2010.08.05
申请号
DE1996155407
申请日期
1996.07.26
申请人
SEMICONDUCTOR ENERGY LABORATORY CO. LTD.
发明人
YAMAZAKI, SHUNPEI;KOYAMA, JUN
分类号
G02F1/1343;H01L21/84;G02F1/1345;G02F1/136;G02F1/1362;G02F1/1368;H01L21/77;H01L27/02;H01L29/786
主分类号
G02F1/1343
代理机构
代理人
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