发明名称 GRINDSTONE FOR CONDITIONING OF SURFACE PLATE, GRINDING APPARATUS FOR CONDITIONING OF SURFACE PLATE AND METHOD FOR CONDITIONING OF GRINDING SURFACE PLATE
摘要 PURPOSE: A grindstone for correcting a surface plate, for producing a workpiece of high surface roughness by imprinting the fine surface of a surface plate, and a correcting method thereof are provided to secure grinding power by maintaining the grain of a stone with a particle-shaped open graphite hole. CONSTITUTION: A grindstone for correcting of a surface plate comprises a surface plate correcting carrier(10), a correcting grindstone(12), and a soft polishing material. The surface plate correcting carrier is arranged on a polishing table(1). The surface plate correcting carrier has a hole(11) for holding the correcting grindstone. The correcting grindstone is maintained in the holding part of the carrier. The polishing device supplies the correcting grindstone to the polishing table to polish. The correcting grindstone is formed in a fan shape on a circular central part.
申请公布号 KR20100087621(A) 申请公布日期 2010.08.05
申请号 KR20090113100 申请日期 2009.11.23
申请人 SHINANO ELECTRIC REFINING CO., LTD. 发明人 KAI YASUOKA;TSUYOSHI SHIMIZU;KENICHI KAZAMA
分类号 B24B37/00;B24B53/013;B24B53/02;B24B53/12;B24D3/32;B24D7/06;H01L21/304 主分类号 B24B37/00
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