| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a large number of imprinting molds inexpensively in case of the imprinting mold having a fine pattern such as that constituted of a plurality of stepped parts or a fine pattern of a three-dimensional structure pattern such as that constituted of curved surfaces and curved lines. <P>SOLUTION: The pattern is formed by light-exposure of the pattern to a photosensitive resin applied onto a substrate 1 and developing treatment, and a pattern layer 6 is formed by heating after formation of the pattern. Then, the pattern layer is exposed to light by being irradiated with UV rays using a photomask. The forming method is repeated to form a first layer 6a, a second layer 6b and a third layer 6c of the pattern layer 6 to produce a mold precursor 7 with the fine pattern formed thereon. Then, the patterned mold 8 is manufactured from the mold precursor 7 by a fine electroforming method. <P>COPYRIGHT: (C)2010,JPO&INPIT |
