发明名称 DICING DEVICE, DICING DEVICE UNIT, AND DICING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a dicing device capable of improving operability and stabilizing the center of gravity of the device without increasing the size of the device, and to provide a dicing device unit, and a dicing method. SOLUTION: In the dicing device 1, an X moving shaft 4 and a Y moving shaft 5 vertically intersecting with the X moving shaft 4 are disposed on diagonal lines of a square housing 2 of the dicing device formed as a square in plan view, a work cutting part 9 is disposed substantially in the center of the dicing device 1, and a work replacement part 13 is disposed on one end side with the X moving shaft 4 disposed thereon. The angle of the square housing 2 on the side with the work replacement part 13 is obliquely cut so as to be substantially parallel to the Y moving shaft 5. Thus, the dicing apparatus 1 can be prevented from being large-sized, and saved in space. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010171440(A) 申请公布日期 2010.08.05
申请号 JP20100057802 申请日期 2010.03.15
申请人 TOKYO SEIMITSU CO LTD 发明人 ARAI YUSUKE
分类号 H01L21/301;B23Q1/00 主分类号 H01L21/301
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