发明名称 |
FOREIGN MATTER INSPECTION METHOD AND FOREIGN MATTER INSPECTION APPARATUS |
摘要 |
In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.
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申请公布号 |
US2010195095(A1) |
申请公布日期 |
2010.08.05 |
申请号 |
US20100758363 |
申请日期 |
2010.04.12 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
YAMASHITA HIROYUKI;KOBAYASHI MAMORU;IMAI EIJI;MORISHIGE YOSHIO;NAGOYA KOICHI;FUKUSHIMA HIDEKI |
分类号 |
G01N21/00 |
主分类号 |
G01N21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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