发明名称 HEATER FOR MANUFACTURING CRYSTAL AND APPARATUS FOR MANUFACTURING CRYSTAL HAVING THE SAME
摘要 PURPOSE: A heater for manufacturing a crystal and a crystal manufacturing device including the same are provided to control temperature distribution of a heating element by controlling the thickness of the heating element. CONSTITUTION: A heater(100) comprises a chamber, a crucible, and a cylindrical heating element(110). The crucible is installed inside a chamber and receives silicon solutions. The heating element surrounds the crucible to heat the crucible. The thickness of the lower side of the heating element is thinner than that of the upper side of the heating element. The heating of the lower side of the heating element is higher than the heating of the upper side of the heating element. A groove(112) is formed along the circumference of the heating element on the surface of the heating element.
申请公布号 KR20100087461(A) 申请公布日期 2010.08.05
申请号 KR20090006466 申请日期 2009.01.28
申请人 SILTRON INC. 发明人 KONG, JUNG HYUN;PARK, SEONG WOOK
分类号 C30B15/14;H05B3/40 主分类号 C30B15/14
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