| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a contact aligner and a contact aligning method such that when a mask and a work area positioned, a seal member does not come into contact with a mask stage. <P>SOLUTION: The contact aligner which includes a mask stage 3 holding the mask 2 where a pattern is formed and a work stage 5 where the work 4 is mounted, is fitted with an ring-shaped seal member 6 at a peripheral part of the mask stage 3 or work stage 5, and irradiates the work 4 with exposure light through the mask 2 in a state wherein the work 4 mounted on the work stage 5 is brought into contact with the mask 2 and the pressure in a space formed of the mask 2, mask stage 3, work 4, work stage 5, and seal member 6 is reduced is characterized in that a moving mechanism 9 which moves up and down the whole of ring-direction of a tip part 62 of the seal member 6 is fitted to the seal member 6. <P>COPYRIGHT: (C)2010,JPO&INPIT |
