发明名称 Vorschubeinrichtung für einen Mehrkoordinaten-Messtisch eines Koordinaten-Messgeräts
摘要 <p>An advancing means for a multi-coordinate measurement table including a drive unit having a friction rod and a motor for each coordinate axis (x, y). The motor contacts one side of the friction rod with its motor shaft and at least one press roller contacts the other side of the friction rod. At least one pressing means is provided biasing the press roller, the friction rod and the motor shaft against each other with a pressing force, whereby the motor shaft frictionally engages the friction rod and converts the rotational movement of the motor into a linear movement of the friction rod. A method for controlling such an advancing means is disclosed as well.</p>
申请公布号 DE102007032088(B4) 申请公布日期 2010.08.05
申请号 DE20071032088 申请日期 2007.07.09
申请人 VISTEC SEMICONDUCTOR SYSTEMS GMBH 发明人 EHRENBERG, TILLMANN
分类号 G01B21/04 主分类号 G01B21/04
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