BIO-SENSOR USING SI NANOWIRE, MANUFACTURING METHOD OF THE BIO-SENSOR, AND DETECTING METHOD FOR CELL USING THE BIO-SENSOR

摘要

PURPOSE: A biosensor comprising single Si nano wire is provided to ensure high sensitivity and stability and to us in biotechnology for genetic analysis and disease diagnosis. CONSTITUTION: A biosensor comprises: a substrate(10); at least one outer electrode(21,22) formed at a part of the substrate; Si nano wire(30) formed at the other part of the substrate; a source electrode(41) formed at one end of Si nano wire and the other part of the substrate; a drain electrode(42) formed at the other end of Si nano wire and the other part of the substrate; and a gate electrode. The thickness of Si nano wire formed on the substrate is 50nm. The substrate is mounted with Si AND SiO_2.