| 摘要 |
PROBLEM TO BE SOLVED: To achieve anode bonding in a state where fixation of a movable electrode and a fixed electrode is suppressed by a simple procedure. SOLUTION: A first bridge member grounds a first belt-like portion 14A through a first contact terminal 144, a second bridge member supplies a processing voltage to a second belt-like portion 15A through a second contact terminal 143, and a third bridge member grounds a third belt-like portion 54 through a third contact terminal 141, so that a first belt-like portion 14B of the other outside substrate is grounded through the third belt-like portion 54. Further, a fourth bridge member supplies a processing voltage to a fourth belt-like portion through a fourth contact terminal, and the processing voltage is supplied to a second belt-like portion 15B of the other outside substrate through the fourth belt-like portion. A center substrate 6 is grounded through a ground terminal, and the processing voltage is applied between the center substrate 6 and a pair of insulating substrates 7A and 7B on reverse-surface sides of outside substrates 8A and 8B to perform anode bonding. At this time, first belt-like portions 14A and 14B and portions (fixed electrodes 2A and 2B) connected to the first belt-like portions 14A and 14B are grounded. COPYRIGHT: (C)2010,JPO&INPIT |
