| 摘要 |
<P>PROBLEM TO BE SOLVED: To produce a sample with a good cross section exposed by preventing a shielding plate for shielding ion beams from moving to the direction toward the ion beams during processing of the sample with the ion beams, by an apparatus for producing a sample which holds a sample at a predetermined position with respect to the ion beams to produce a sample with a cross section exposed by irradiating with the ion beams. Ž<P>SOLUTION: The apparatus for producing a sample is provided with a first supporting member 2 with a supported base end and a free distal end; a second supporting member 9 with a base end supported by the distal end of the first supporting member 2 and a free distal end directed to the base end of the first supporting member 2; and a shielding plate 10 supported by the second supporting member 9; and a heater 13 attached on the second supporting member 9. The second supporting member 9 is heated by the heater 13 to expand toward the direction to the base end of the first supporting member and holds a side edge toward the distal end of the first supporting member 2 of the shielding plate 10 as an irradiation position of ion beams B. A sample 101 is disposed at a position where the ion beams B are shielded by the shielding plate 10 and a processing is performed on a part of the sample 101 exposed from the side edge of the shielding plate 10. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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