| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a nozzle device capable of jetting a liquid to form satisfactory and precise film. Ž<P>SOLUTION: A slit-shaped nozzle opening 5 jetting the liquid W in a film shape is provided at the lower part of a supply pipe 1 to which the liquid W is supplied in the longitudinal direction. A slit-shaped auxiliary nozzle opening 3 is provided between the supply pipe 1 and the nozzle opening 5 and a liquid collecting part 4 for collecting the liquid W jetted from the auxiliary nozzle opening 3 is provided between the nozzle opening 5 and the auxiliary nozzle opening 3. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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