| 摘要 |
PROBLEM TO BE SOLVED: To provide a wear-resistant CrN film formed body in which a CrN film excellent in wear resistance is consistently obtained, or the CrN film having the wear resistance and the adhesiveness is formed. SOLUTION: In the wear-resistant CrN film, when it is defined that the total of the peak intensity corresponding to (111) plane, (200) plane, (220) plane, (222) plane, (311) plane, and (400) plane of the crystal plane to be measured by the X-ray diffraction analysis is 100%, the peak intensity of (111) plane is 8-40%, and the crystallite size in (111) plane to be obtained by a Scherrer method is ≤25 nm. When the peak intensity of (111) plane is within a predetermined range, and the crystallite size in (111) plane is within the predetermined range, the film is considered to be affected by the anisotropy of the crystal orientation, and the wear resistance is considerably improved. COPYRIGHT: (C)2010,JPO&INPIT
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