| 摘要 |
A grinding device (30) for grinding an object (31) at high accuracy has a support table (32) on which the object (31) is supported and fixed, a vertically movable rotating shaft (34) arranged above the support table, a drive device (35) for vertically moving the rotating shaft, a drive device (36) for rotating the rotating shaft, an elastic body (37) fixed to a base section of the rotating shaft, an annular grind stone (38) provided to a bottom of the elastic body, ultrasonic vibrators (39) arranged on the elastic body, and a transmission unit (41) for transmitting electric energy to the ultrasonic vibrators, in which the elastic body is an annular elastic body and a connection plate (42) is provided between the annular elastic body and the base section of the rotating shaft under such condition that the connection plate and the annular elastic body are connected by connection means (45) having alternately arranged connection sections and space sections and each ultrasonic vibrator is arranged at a predetermined position of the elastic body.
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