发明名称 APPARATUS FOR TESTING SEMICONDUCTOR
摘要 <P>PROBLEM TO BE SOLVED: To provide an apparatus for testing a semiconductor which enables easy grasp of a test result of a direct current test without imposing troublesome work upon a user, and thus enables enhancement of testing efficiency. Ž<P>SOLUTION: The apparatus 1 for testing the semiconductor includes a plurality of measuring devices 30a-30n which are used for a test (direct current test) as to whether or not a direct current signal obtained from a semiconductor device by impression of the direct current signal on the semiconductor device is within a prescribed standard, a graphing part 25 which prepares a graph correlating the result of measurement obtained from each of the measuring devices 30a-30n with testing conditions (permissible upper limit value and permissible lower limit value of the direct current signal used for pass/fail determination) of the direct-current test, and a display processing part 26 which displays the graph prepared by the graphing part 25 on a display part 27. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010169438(A) 申请公布日期 2010.08.05
申请号 JP20090010194 申请日期 2009.01.20
申请人 YOKOGAWA ELECTRIC CORP 发明人 OGATA HITOSHI
分类号 G01R31/26;G01R31/28 主分类号 G01R31/26
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