| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser processing device and a processing method of thin-film solar battery, capable of processing a patterning line for defining unit cells on a thin-film solar battery of large area at a high speed and high accuracy, and having an advantage of miniaturizing the device. <P>SOLUTION: The laser processing device 100 includes two galvanoscanners (14 and 24) which scan two processing regions R1 and R2 (y1 and y2) on a processing stage (4) aligned in a longitudinal carrying direction of a flexible substrate 1 with laser beams, respectively, while concurrently performing patterning; and a control part (19) common to them. Each galvanoscanner has a first mirror (14a, 24a) and a second mirror (14b, 24b), corresponding to scanning in orthogonal two axis directions; the scanning direction of each first mirror is set at the longitudinal carrying direction (y) parallel to the patterning line (Gy), related to unit cell series connection of the flexible substrate; and the scanning direction of each second mirror is set at a width direction (x) parallel to the patterning line (Gx) dividing each unit module of the flexible substrate and the boundary of each processing region. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
