摘要 |
<p><P>PROBLEM TO BE SOLVED: To easily check whether there is a defect in an optically transparent stamper. <P>SOLUTION: A data recording part is irradiated with laser light having a wavelength of≤450 nm and a laser numerical aperture NA of≥0.6, and whether or not, in a sum signal of the voltage signals thereof, the maximum voltage value level Vf within the range of frequencies 60-170 times the number of revolutions of the stamper and an average sum signal voltage value Vave of a data recording part meet (1) Vf/Vave<7.7×10<SP>-4</SP>is determined. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |