| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical element array in which an anti-reflection film of predetermined film thickness is securely formed on the surface of the optical face by a simple method, and to provide a method for manufacturing the optical element array. <P>SOLUTION: The plurality of optical faces 3 are formed on at least the one side of a substrate 2 made of a semiconductor material. The substrate 2 with the optical faces 3 formed on the one side thereof is thermally oxidized or thermally oxynitrogenized, thereby forming an oxidized or oxynitrogenized film 4 on both sides of the substrate 2. When the refractive index is represented by n, the film thickness is represented by d, and the wavelength of light to be transmitted is represented by λ, the oxidized or oxynitrogenized film 4 is formed to satisfy the relation expressed by nd=λ/4. <P>COPYRIGHT: (C)2010,JPO&INPIT |
