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发明名称
摘要
申请公布号
JP4515931(B2)
申请公布日期
2010.08.04
申请号
JP20050025215
申请日期
2005.02.01
申请人
发明人
分类号
H01L21/336;H01L21/20;H01L21/268;H01L29/786
主分类号
H01L21/336
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