发明名称 |
Shape measuring apparatus |
摘要 |
A shape measuring apparatus includes a probe for scanning across a surface to be measured, while vibrating up and down; a minute-vibration generation section for vibrating the probe up and down; a vertical movement control section for moving the probe up and down to keep a constant contact force or a constant distance between the surface to be measured and the probe; a scanning section for scanning the surface to be measured with the probe; a displacement sensor for measuring the vertical displacement of the probe and outputting a probe displacement signal; and a signal processing section for obtaining information about the contact force or the distance between the surface to be measured and the probe from a high-frequency component of the probe displacement signal, and for obtaining information about profile of the surface to be measured from a low-frequency component of the signal obtained when the surface to be measured is scanned such that the distance or the contact force is kept constant. |
申请公布号 |
EP2017599(A3) |
申请公布日期 |
2010.08.04 |
申请号 |
EP20080013022 |
申请日期 |
2008.07.18 |
申请人 |
MITUTOYO CORPORATION |
发明人 |
KAWASAKI, KAZUHIKO;SUZUKI, YOSHIMASA;KOGA, SATOSHI |
分类号 |
G01B5/20;G01B21/20;G01Q20/00;G01Q60/32 |
主分类号 |
G01B5/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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