METHOD FOR GENERATING HIGH-SPEED PARTICLE AND SYSTEM FOR GENERATING HIGH-SPEED PARTICLE

摘要

The present invention relates to a high-speed particle generating method and so on for generating high-speed particles from a high-speed particle generating target by condensing a pulsed laser beam to a micro-spot on the surface of a high-speed particle generating target. The high-speed particle generating method is a method that generates high-speed particles by condensing a pulsed laser beam generated from a pulsed laser beam generator through an irradiation optical system at a predetermined condensing point, and irradiating the pulsed laser beam to the high-speed particle generating target that is set at the predetermined condensing point, the method including a first step of preparing a reference data, a second step of measuring the wave front of the pulsed laser beam, and a third step of compensating the wave front of the pulsed laser beam based on the reference data.