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发明名称
METHOD FOR FORMING THIN SILICON NITRIDE LAYERS ON THE SURFACE OF SUBSTRATES
摘要
申请公布号
EP1727925(B1)
申请公布日期
2010.08.04
申请号
EP20050736348
申请日期
2005.03.22
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
ROGLER, DANIELA;HOPFE, VOLKMAR;MAEDER, GERRIT
分类号
C23C16/34;C23C16/44;C23C16/452;C23C16/455
主分类号
C23C16/34
代理机构
代理人
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地址
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