Method of manufacturing a multi-layer sensor structure

摘要

A method of manufacturing a multi-layer sensor structure is provided. The method may include forming a waveguide on a substrate; forming a light coupling arrangement in the waveguide, wherein the light coupling arrangement is substantially non-wavelength selective; forming at least one light source above the waveguide; and forming at least one photo detector above the waveguide. The at least one light source, the at least one photo detector and the waveguide comprise organic material. The waveguide, the light coupling arrangement, the at least one light source and the at least one photo detector are monolithically integrated.