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发明名称
EXPOSURE DEVICE AND FABRICATION METHOD THEREOF
摘要
申请公布号
EP1975980(A4)
申请公布日期
2010.08.04
申请号
EP20060843610
申请日期
2006.12.28
申请人
NIKON CORPORATION
发明人
EBIHARA, AKIMITSU
分类号
H01L21/027;G03F7/20;G03F9/00
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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