发明名称 Method for producing resist composition and resist composition
摘要 A method for producing a resist composition including a resin component (A) that exhibits changed alkali solubility under the action of acid and an acid generator component (B) that generates acid upon exposure, the method including the steps of: obtaining the component (A) by mixing a plurality of copolymers, which are composed of the same structural units but have mutually different measured values for the contact angle.
申请公布号 US7767378(B2) 申请公布日期 2010.08.03
申请号 US20050718388 申请日期 2005.11.04
申请人 TOKYO OHKA KOGYO CO., LTD. 发明人 SHIMIZU HIROAKI;TAKESHITA MASARU
分类号 G03F7/039 主分类号 G03F7/039
代理机构 代理人
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