发明名称 |
Method for producing resist composition and resist composition |
摘要 |
A method for producing a resist composition including a resin component (A) that exhibits changed alkali solubility under the action of acid and an acid generator component (B) that generates acid upon exposure, the method including the steps of: obtaining the component (A) by mixing a plurality of copolymers, which are composed of the same structural units but have mutually different measured values for the contact angle.
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申请公布号 |
US7767378(B2) |
申请公布日期 |
2010.08.03 |
申请号 |
US20050718388 |
申请日期 |
2005.11.04 |
申请人 |
TOKYO OHKA KOGYO CO., LTD. |
发明人 |
SHIMIZU HIROAKI;TAKESHITA MASARU |
分类号 |
G03F7/039 |
主分类号 |
G03F7/039 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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