发明名称 Interconnection substrate, skew measurement method, and test apparatus
摘要 There is provided an interconnection substrate used in skew adjustment between output pins in a test apparatus, the test apparatus supplying a test signal to a device under test to test the device under test, the interconnection substrate including: a first terminal coupled to a first output pin that outputs the test signal; a second terminal coupled to a second output pin that outputs the test signal; a first interconnection connecting the first terminal to a bonding node; a second interconnection connecting the second terminal to the bonding node; and a third interconnection connecting the bonding node to an output node, where the first interconnection and the second interconnection have a length equal to each other.
申请公布号 US7768255(B2) 申请公布日期 2010.08.03
申请号 US20080199811 申请日期 2008.08.28
申请人 ADVANTEST CORPORATION 发明人 TAKIZAWA SHIGEKI
分类号 G01R31/26 主分类号 G01R31/26
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