发明名称 Chilled wafer dicing
摘要 A method for dicing a wafer is disclosed. One illustrative method includes forming a layer of frozen material above a plurality of integrated circuit dies on a substrate and performing a cutting process to cut through the layer of frozen material and the substrate to singulate the plurality of dies. Another method includes performing a cutting process to singulate a plurality of integrated circuit dies having a layer of frozen material formed above the plurality of dies.
申请公布号 US7767557(B2) 申请公布日期 2010.08.03
申请号 US20070747310 申请日期 2007.05.11
申请人 MICRON TECHNOLOGY, INC. 发明人 REEDER WILLIAM JEFFERY
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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