| 发明名称 |
Replacement apparatus for an optical element |
| 摘要 |
A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
|
| 申请公布号 |
US7768723(B2) |
申请公布日期 |
2010.08.03 |
| 申请号 |
US20090400965 |
申请日期 |
2009.03.10 |
| 申请人 |
CARL ZEISS SMT AG |
发明人 |
KUGLER JENS;SORG FRANZ;WURMBRAND ANDREAS;SCHLETTERER THOMAS;ITTNER THOMAS |
| 分类号 |
G02B7/02;G02B7/00;G02B7/14;G02B13/14;G03F7/20 |
主分类号 |
G02B7/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
