发明名称 |
Method for obtaining force combinations for template deformation using nullspace and methods optimization techniques |
摘要 |
The present invention is directed towards a method for determining deformation parameters that a patterned device would undergo to minimize dimensional variations between a recorded pattern thereon and a reference pattern, the method including, inter alia, comparing spatial variation between features of the recorded pattern with respect to corresponding features of the reference pattern; and determining deformation forces to apply to the patterned device to attenuate the dimensional variations, with the forces having predetermined constraints, wherein a summation of a magnitude of the forces is substantially zero and a summation of moment of the forces is substantially zero.
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申请公布号 |
US7768624(B2) |
申请公布日期 |
2010.08.03 |
申请号 |
US20070695469 |
申请日期 |
2007.04.02 |
申请人 |
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM;MOLECULAR IMPRINTS, INC. |
发明人 |
CHERALA ANSHUMAN;SREENIVASAN SIDLGATA V.;CHOI BYUNG-JIN;THOMPSON ECRON D. |
分类号 |
G03F9/00 |
主分类号 |
G03F9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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