发明名称 |
Method for SEM measurement of features using magnetically filtered low loss electron microscopy |
摘要 |
A magnetically focused scanning charged particle microscope having an array detector placed to detect scattered particles, wherein the particles fall substantially non-tangentially to the surface of the array detector.
|
申请公布号 |
US7767962(B2) |
申请公布日期 |
2010.08.03 |
申请号 |
US20060581498 |
申请日期 |
2006.10.16 |
申请人 |
|
发明人 |
GIGNAC LYNNE;WELLS OLIVER |
分类号 |
H01J37/244 |
主分类号 |
H01J37/244 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|